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公开(公告)号:US20220309216A1
公开(公告)日:2022-09-29
申请号:US17491739
申请日:2021-10-01
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sangwoon LEE , Joohyun JEON , Sungjin KIM , Seunghyun KIM , Wonki ROH , Chulwoo PARK , Seongjae BYEON , Taeyoon AN , Hyoeun JUNG
IPC: G06F30/3308 , G06F30/25
Abstract: A method of modeling damages to a crystal caused by an incident particle includes obtaining particle information and crystal information; estimating energy loss of the incident particle based on the particle information and the crystal information; estimating a volume of a vacancy based on the energy loss; estimating a vacancy reaction based on the crystal information and the volume of the vacancy; and generating output data based on the vacancy reaction, the output data including quantification data of the damages.