公开(公告)号：US20240079264A1

公开(公告)日：2024-03-07

申请号：US18235603

申请日：2023-08-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Jonggu Lee ,  Jeonggil Kim ,  Hyeonjin Kim ,  Kyoungwhan Oh

IPC: H01L21/687 ,  H01L21/67

CPC classification number: H01L21/68742 ,  H01L21/67288 ,  H01L21/68785

Abstract: A substrate supporting apparatus includes a stage table configured to support a substrate and including a plurality of openings, a plurality of lift pins disposed to be vertically movable through the plurality of openings and configured to support the substrate, a lift support positioned outside the stage table from a plan view and vertically movable to support the substrate, an actuator configured to vertically actuate the plurality of lift pins and the lift support so as to load the substrate onto the stage table, and a controller configured to control the actuator.