-
公开(公告)号:US20250063788A1
公开(公告)日:2025-02-20
申请号:US18431190
申请日:2024-02-02
Applicant: Samsung Electronics Co., Ltd.
Inventor: Sang Min CHO , Hee Sub KIM , Bo Mi KIM , Chul Sung KIM , Geun Hee JEONG
IPC: H01L29/66 , H01L21/8234 , H01L27/088 , H01L29/06 , H01L29/08 , H01L29/423 , H01L29/775 , H01L29/786
Abstract: The semiconductor device includes a substrate, first and second active patterns extending in a first direction, the second active pattern spaced apart from the first active pattern in a second direction different from the first direction, a gate electrode extending in the second direction, a first and second source/drain region each on one side of the gate electrode, a first and second source/drain contact each extending in the second direction on and connected to the first and second source/drain region respectively, and a contact separation layer separating the first and second source/drain contacts, the contact separation layer including a first portion and a second portion on first portion both between the first and second source/drain regions, wherein a width of the first portion of the contact separation layer in the first direction is greater than a width of the second portion of the contact separation layer in the first direction.