IMAGE SENSOR INCLUDING DEVICE ISOLATION STRUCTURE

    公开(公告)号:US20240321921A1

    公开(公告)日:2024-09-26

    申请号:US18610413

    申请日:2024-03-20

    Abstract: Provided is an image sensor including a device isolation structure. The image sensor includes a semiconductor substrate including a pixel array including a plurality of pixels, a first photoelectric conversion device and a second photoelectric conversion device inside the semiconductor substrate and included in each of the plurality of pixels, microlenses on the first photoelectric conversion device and the second photoelectric conversion device and a device isolation structure between the plurality of pixels and between the first photoelectric conversion device and the second photoelectric conversion device, the device isolation structure opening a part between the first photoelectric conversion device and the second photoelectric conversion device, including an open region at each edge of the plurality of pixels, and may be continuous in the pixel array.

    IMAGE SENSOR
    2.
    发明公开
    IMAGE SENSOR 审中-公开

    公开(公告)号:US20240321923A1

    公开(公告)日:2024-09-26

    申请号:US18614335

    申请日:2024-03-22

    CPC classification number: H01L27/1463 H01L27/14612 H04N25/704

    Abstract: An image sensor includes a substrate including a first pixel, a second pixel, a device isolation pattern, and at least one open region, wherein each of the first pixel and the second pixel includes a first pixel region including a first photoelectric conversion device and a second pixel region including a second photoelectric conversion device, the second pixel region being parallel with the first pixel region in a first direction, and wherein the device isolation pattern includes a first portion between the first pixel region and the second pixel region of the first pixel and between the first pixel region and the second pixel region of the second pixel, a second portion between the first pixel region of the first pixel and the first pixel region of the second pixel, and a third portion between the second pixel region of the first pixel and the second pixel region of the second pixel.

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