公开(公告)号：US20240387585A1

公开(公告)日：2024-11-21

申请号：US18426734

申请日：2024-01-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dohyun KWON ,  Sangchun PARK ,  Sungyong YOU ,  Dong-Chul LEE

IPC: H01L27/146

Abstract: An image sensor comprises a substrate that comprises a first surface, a second surface facing the first surface, and a plurality of pixel regions disposed along a first direction and a second direction. The sensor comprises a plurality of ground regions that are disposed within a portion of the substrate along a depth direction perpendicular to the first direction and the second direction from the first surface of the substrate. The sensor comprises a deep trench that extends from the first surface of the substrate to the second surface of the substrate. The sensor comprises a shallow trench that extends into the portion of the substrate along the depth direction from the first surface of the substrate and is disposed at an outer edge of at least a portion of the deep trench.

公开(公告)号：US20240321923A1

公开(公告)日：2024-09-26

申请号：US18614335

申请日：2024-03-22

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Haeyeon CHUNG ,  Sangcheon PARK ,  Sungyong YOU ,  Sungsoo CHOI

IPC: H01L27/146 ,  H04N25/704

CPC classification number: H01L27/1463 ,  H01L27/14612 ,  H04N25/704

Abstract: An image sensor includes a substrate including a first pixel, a second pixel, a device isolation pattern, and at least one open region, wherein each of the first pixel and the second pixel includes a first pixel region including a first photoelectric conversion device and a second pixel region including a second photoelectric conversion device, the second pixel region being parallel with the first pixel region in a first direction, and wherein the device isolation pattern includes a first portion between the first pixel region and the second pixel region of the first pixel and between the first pixel region and the second pixel region of the second pixel, a second portion between the first pixel region of the first pixel and the first pixel region of the second pixel, and a third portion between the second pixel region of the first pixel and the second pixel region of the second pixel.