公开(公告)号：US20240370043A1

公开(公告)日：2024-11-07

申请号：US18652866

申请日：2024-05-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seunghun Kim ,  Minjung Kim ,  Taemin Kim ,  Jiho Uh ,  Jinseok Lee ,  Geongu Jang

IPC: G05D7/06 ,  H01L21/67

Abstract: A method of manufacturing using a mass flow controller (MFC) includes closing a valve installed in a flow path of the MFC to prevent a fluid from flowing therein due to a closure of the valve, determining that the fluid is not leaking, determining that the fluid is stabilized, determining that a pressure sensor is normal, calculating a zero point calibration value of the pressure sensor based on a zero point of the pressure sensor, a time when power is supplied to the MFC, and a time when a flow is supplied to the MFC, applying the zero point calibration value to the pressure sensor, and measure the mass flow rate through the flow path with the pressuring sensor and adjusting the valve based on the mass flow rate to regulate the flow of the fluid to a manufacturing device.