专利检索 ap:("Samsung Electronics Co., Ltd.") AND inv:"Elijah L. Rhoades" 第 1 页

1.

发明申请
SPIN CHUCK JIG AND METHOD OF LIFTING SPIN CHUCK USING THE SAME 审中-公开

公开(公告)号：US20200030842A1

公开(公告)日：2020-01-30

申请号：US16046988

申请日：2018-07-26

申请人： Samsung Electronics Co., Ltd.

发明人： Michael D. Ybarra , Elijah L. Rhoades

IPC分类号： B05C13/02

摘要： A spin chuck jig includes a handle having first holes, a base having second holes, wherein a number of the second holes and a number of first holes are the same, and bolts each penetrating one of the first holes and one of the second holes so that the handle and the base are attached to a spin chuck to be lifted from a spin process equipment.

2.

发明授权
Spin chuck jig and method of lifting spin chuck using the same 有权

公开(公告)号：US11958071B2

公开(公告)日：2024-04-16

申请号：US17015052

申请日：2020-09-08

申请人： Samsung Electronics Co., Ltd.

发明人： Michael D. Ybarra , Elijah L. Rhoades

IPC分类号： B65G7/12 , B05C13/02 , B23B31/39 , H01L21/68

CPC分类号： B05C13/02 , B23B31/39 , B65G7/12 , H01L21/68

摘要： A spin chuck jig includes a handle having first holes, a base having second holes, wherein a number of the second holes and a number of first holes are the same, and bolts each penetrating one of the first holes and one of the second holes so that the handle and the base are attached to a spin chuck to be lifted from a spin process equipment.