公开(公告)号：US10395951B2

公开(公告)日：2019-08-27

申请号：US15442481

申请日：2017-02-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seok-Hoon Kim ,  Kyoung-Seob Kim ,  Dong-Chul Kim ,  Hyo-San Lee

IPC: B08B3/00 ,  H01L21/67 ,  B08B1/04 ,  B08B3/02 ,  B08B3/10

Abstract: In a method of cleaning a substrate, a protecting liquid may be sprayed to a surface of the substrate from a first position in a first spray direction. Cleaning droplets may be injected on to the surface of the substrate. The protecting liquid may be sprayed to the surface of the substrate from a second position different from the first position in a second spray direction. For example, the protecting liquid may be always sprayed from the central portion toward the edge portions in the substrate so that the protecting liquid on the substrate may have a uniform thickness.