公开(公告)号：US20200058727A1

公开(公告)日：2020-02-20

申请号：US16521394

申请日：2019-07-24

Applicant: Samsung Display Co., Ltd. ,  POSTECH ACADEMY-INDUSTRY FOUNDATION

Inventor： Sang Gab KIM ,  Hyun Min CHO ,  Tae Sung KIM ,  Yu-Gwang JEONG ,  Su Bin BAE ,  Jin Seock KIM ,  Sang Gyun KIM ,  Hyo Min KO ,  Kil Won CHO ,  Han Sol LEE

IPC: H01L27/32

Abstract: An manufacturing method of a display device may include the following steps: forming a transistor on a substrate; forming an insulating layer on the transistor; forming a conductive layer including silver on the insulating layer; forming a photosensitive member on the conductive layer; forming an electrode of a light-emitting element by etching the conductive layer; performing plasma treatment on a structure that comprises the electrode, the plasma treatment using a gas including a halogen; and removing a product that is resulted from the plasma treatment.