Thin film deposition apparatus
    2.
    发明授权
    Thin film deposition apparatus 有权
    薄膜沉积装置

    公开(公告)号:US09410237B2

    公开(公告)日:2016-08-09

    申请号:US14018701

    申请日:2013-09-05

    CPC classification number: C23C14/243

    Abstract: A thin film deposition apparatus includes a vacuum chamber, a substrate supporter disposed in the vacuum chamber to support a target substrate on which a thin film is deposited, and a deposition source that evaporates a deposition material and supplies the evaporated deposition material to the target substrate. The deposition source includes a crucible that includes a deposition material-containing portion to accommodate the deposition material and a first flange at an upper end of the deposition material-containing portion, a spray nozzle that includes a spray portion through which the evaporated deposition material is sprayed and a second flange at a lower end of the spray portion to make contact with the first flange, and a cooling member attached to an outer surface of the first flange and the second flange.

    Abstract translation: 薄膜沉积设备包括真空室,设置在真空室中以支撑其上沉积有薄膜的目标基板的基板支撑件和蒸发沉积材料并将蒸发的沉积材料供应到目标基板的沉积源 。 沉积源包括坩埚,其包括用于容纳沉积材料的沉积材料容纳部分和在沉积材料容纳部分的上端处的第一凸缘,喷嘴,其包括喷射部分,蒸发的沉积材料通过该喷射部分 并且在喷雾部分的下端具有与第一凸缘接触的第二凸缘,以及附接到第一凸缘和第二凸缘的外表面的冷却构件。

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