Organic layer deposition assembly, organic layer deposition apparatus, organic light-emitting display apparatus and method of manufacturing the same
    1.
    发明授权
    Organic layer deposition assembly, organic layer deposition apparatus, organic light-emitting display apparatus and method of manufacturing the same 有权
    有机层沉积组件,有机层沉积装置,有机发光显示装置及其制造方法

    公开(公告)号:US09570714B2

    公开(公告)日:2017-02-14

    申请号:US13794659

    申请日:2013-03-11

    CPC classification number: H01L51/56 C23C14/042 C23C14/24 H01L51/0011 H01L51/52

    Abstract: An organic layer deposition assembly, an organic layer deposition apparatus, an organic light-emitting display apparatus, and a method of manufacturing the organic light-emitting display apparatus, in order to improve a characteristic of a deposited layer, the organic layer deposition assembly including a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source, and including a plurality of deposition source nozzles; and a patterning slit sheet disposed while facing the deposition source nozzle unit, and including a plurality of patterning slits and one or more alignment confirmation pattern slits that are formed at edge portions of the plurality of patterning slits, wherein the deposition material that is discharged from the deposition source passes through the patterning slit sheet and then is formed on the substrate, while a deposition process is performed.

    Abstract translation: 有机层沉积组件,有机层沉积设备,有机发光显示设备和制造有机发光显示设备的方法,为了提高沉积层的特性,有机层沉积组件包括 用于排出沉积材料的沉积源; 沉积源喷嘴单元,设置在沉积源的一侧,并且包括多个沉积源喷嘴; 以及与所述沉积源喷嘴单元相对设置的图案化缝隙片,并且包括形成在所述多个图案化缝隙的边缘部分处的多个图案化缝隙和一个或多个取向确认图案狭缝,其中,从 沉积源通过图案化缝隙片,然后形成在衬底上,同时进行沉积工艺。

    Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus
    2.
    发明授权
    Patterning slit sheet assembly, organic layer deposition apparatus, method of manufacturing organic light-emitting display apparatus, and the organic light-emitting display apparatus 有权
    图案化狭缝片组件,有机层沉积装置,有机发光显示装置的制造方法和有机发光显示装置

    公开(公告)号:US09076982B2

    公开(公告)日:2015-07-07

    申请号:US14222472

    申请日:2014-03-21

    CPC classification number: H01L51/5203 C23C14/042 H01L51/0011 H01L51/56

    Abstract: A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.

    Abstract translation: 一种图案化缝隙片组件,用于执行沉积工艺以在所需的精细图案中在衬底上形成薄膜。 图形化缝隙片组件包括具有多个狭缝的图案化缝隙片,与图案化缝隙片组合以支撑图案化缝隙片的框架,以及支撑单元,其包括允许移动或固定以支撑图案化缝隙片的上部构件 当向图案化缝隙片施加重力时构图缝隙片和与图案化缝隙片比上部构件更远离的下部构件,其中上部构件固定在下部构件上。

    ORGANIC LAYER DEPOSITION ASSEMBLY, ORGANIC LAYER DEPOSITION APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME
    3.
    发明申请
    ORGANIC LAYER DEPOSITION ASSEMBLY, ORGANIC LAYER DEPOSITION APPARATUS, ORGANIC LIGHT-EMITTING DISPLAY APPARATUS AND METHOD OF MANUFACTURING THE SAME 有权
    有机层沉积装置,有机层沉积装置,有机发光显示装置及其制造方法

    公开(公告)号:US20140034917A1

    公开(公告)日:2014-02-06

    申请号:US13794659

    申请日:2013-03-11

    CPC classification number: H01L51/56 C23C14/042 C23C14/24 H01L51/0011 H01L51/52

    Abstract: An organic layer deposition assembly, an organic layer deposition apparatus, an organic light-emitting display apparatus, and a method of manufacturing the organic light-emitting display apparatus, in order to improve a characteristic of a deposited layer, the organic layer deposition assembly including a deposition source for discharging a deposition material; a deposition source nozzle unit disposed at a side of the deposition source, and including a plurality of deposition source nozzles; and a patterning slit sheet disposed while facing the deposition source nozzle unit, and including a plurality of patterning slits and one or more alignment confirmation pattern slits that are formed at edge portions of the plurality of patterning slits, wherein the deposition material that is discharged from the deposition source passes through the patterning slit sheet and then is formed on the substrate, while a deposition process is performed.

    Abstract translation: 有机层沉积组件,有机层沉积设备,有机发光显示设备和制造有机发光显示设备的方法,为了提高沉积层的特性,有机层沉积组件包括 用于排出沉积材料的沉积源; 沉积源喷嘴单元,设置在沉积源的一侧,并且包括多个沉积源喷嘴; 以及与所述沉积源喷嘴单元相对设置的图案化缝隙片,并且包括形成在所述多个图案化缝隙的边缘部分处的多个图案化缝隙和一个或多个取向确认图案狭缝,其中,从 沉积源通过图案化缝隙片,然后形成在衬底上,同时进行沉积工艺。

    PATTERNING SLIT SHEET ASSEMBLY, ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS, AND THE ORGANIC LIGHT-EMITTING DISPLAY APPARATUS
    5.
    发明申请
    PATTERNING SLIT SHEET ASSEMBLY, ORGANIC LAYER DEPOSITION APPARATUS, METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS, AND THE ORGANIC LIGHT-EMITTING DISPLAY APPARATUS 有权
    图案片组件,有机层沉积装置,制造有机发光显示装置的方法和有机发光显示装置

    公开(公告)号:US20140203264A1

    公开(公告)日:2014-07-24

    申请号:US14222472

    申请日:2014-03-21

    CPC classification number: H01L51/5203 C23C14/042 H01L51/0011 H01L51/56

    Abstract: A patterning slit sheet assembly for performing a deposition process to form a thin film on a substrate in a desired fine pattern. The patterning slit sheet assembly includes a patterning slit sheet having a plurality of slits, a frame combined with the patterning slit sheet to support the patterning slit sheet, and a support unit including an upper member that is allowed to be moved or fixed to support the patterning slit sheet when a gravitational force is applied to the patterning slit sheet and a lower member disposed more apart from the patterning slit sheet than the upper member, wherein the upper member is fixed on the lower member.

    Abstract translation: 一种图案化缝隙片组件,用于执行沉积工艺以在所需的精细图案中在衬底上形成薄膜。 图形化缝隙片组件包括具有多个狭缝的图案化缝隙片,与图案化缝隙片组合以支撑图案化缝隙片的框架,以及支撑单元,其包括允许移动或固定以支撑图案化缝隙片的上部构件 当向图案化缝隙片施加重力时构图缝隙片和与图案化缝隙片比上部构件更远离的下部构件,其中上部构件固定在下部构件上。

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