公开(公告)号：US20170141313A1

公开(公告)日：2017-05-18

申请号：US15170549

申请日：2016-06-01

Applicant: Samsung Display Co., Ltd.

Inventor： Soohyun MIN

IPC: H01L51/00 ,  C23C14/22 ,  H01L51/56 ,  C23C14/06 ,  C23C14/08 ,  C23C14/34 ,  C23C14/04

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/0641 ,  C23C14/0676 ,  C23C14/08 ,  C23C14/221 ,  C23C14/24 ,  C23C14/34 ,  H01L27/3244 ,  H01L51/5256 ,  H01L51/56 ,  H01L2227/323 ,  H01L2251/5338

Abstract: A mask frame assembly includes a frame, a first support bar, split masks, and a second support bar. The frame includes an opening. The first support bar spans the opening in a first direction, the first support bar includes first ends disposed on the frame. The split masks span the opening in a second direction crossing the first direction, the split masks include first portions disposed on the first support bar and second ends disposed on the frame. The second support bar is disposed on the first support bar, the second support bar being more magnetic than the first support bar.

公开(公告)号：US20200013658A1

公开(公告)日：2020-01-09

申请号：US16363430

申请日：2019-03-25

Applicant: Samsung Display Co., Ltd.

Inventor： Junhyeuk KO ,  Euigyu KIM ,  Minchul SONG ,  Byungik KONG ,  Jaesuk MOON ,  Soohyun MIN ,  Seungjin LEE ,  Seungju HONG

IPC: H01L21/683 ,  H01L51/56 ,  C23C14/04 ,  C23C14/50

Abstract: An electrostatic chuck unit includes a first wiring portion configured to generate a relatively weak electrostatic force and a second wiring portion configured to generate a relatively strong electrostatic force.