公开(公告)号：US20160079532A1

公开(公告)日：2016-03-17

申请号：US14697925

申请日：2015-04-28

Applicant: Samsung Display Co., Ltd.

Inventor： Sangmin YI ,  Mingoo KANG ,  Minchul SONG ,  Sangshin LEE ,  Sangyun LEE

IPC: H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0002 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/56

Abstract: Disclosed is a mask assembly for deposition including: a frame having an opening; a mask having at least one pattern part formed in a second direction that is different from a first direction, wherein at least a portion of the mask is supported by the frame and the at least one pattern part has one or more slits continuously formed in the first direction; and at least one support stick extending in the second direction across the opening so as to support at least a portion of the mask.

Abstract translation: 公开了一种用于沉积的掩模组件，包括：具有开口的框架; 具有沿与第一方向不同的第二方向形成的至少一个图案部的掩模，其中，所述掩模的至少一部分由所述框架支撑，所述至少一个图案部具有连续形成在所述第一方向上的一个或多个狭缝 第一方向 以及至少一个支撑杆，沿着所述第二方向延伸穿过所述开口以便支撑所述掩模的至少一部分。

公开(公告)号：US20200013658A1

公开(公告)日：2020-01-09

申请号：US16363430

申请日：2019-03-25

Applicant: Samsung Display Co., Ltd.

Inventor： Junhyeuk KO ,  Euigyu KIM ,  Minchul SONG ,  Byungik KONG ,  Jaesuk MOON ,  Soohyun MIN ,  Seungjin LEE ,  Seungju HONG

IPC: H01L21/683 ,  H01L51/56 ,  C23C14/04 ,  C23C14/50

Abstract: An electrostatic chuck unit includes a first wiring portion configured to generate a relatively weak electrostatic force and a second wiring portion configured to generate a relatively strong electrostatic force.

公开(公告)号：US20180083193A1

公开(公告)日：2018-03-22

申请号：US15701856

申请日：2017-09-12

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Jongbum KIM ,  Sangmin YI ,  Daewon BAEK ,  Minchul SONG ,  Sangshin LEE ,  Seungjin LEE ,  Jiyun CHUN

IPC: H01L51/00 ,  H01L51/56

CPC classification number: H01L51/0011 ,  C23C14/042 ,  C23C14/12 ,  H01L21/00 ,  H01L21/67 ,  H01L51/0002 ,  H01L51/001 ,  H01L51/0014 ,  H01L51/56

Abstract: A method of manufacturing a division mask includes pulling opposite end portions of a mask member in a first direction to fasten the mask member to a fastening portion, forming a first pattern portion having a plurality of first openings on the fastened mask member, such that the first pattern portion has a longer length in the first direction toward a central portion of the first pattern portion, and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion.