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公开(公告)号：US20190354008A1
公开(公告)日：2019-11-21
申请号：US16409973
申请日：2019-05-13
Applicant: Samsung Display Co., Ltd.
Inventor： Junggun NAM , Taewoo KIM , Eunjung KIM , Seongsoon CHO
IPC: G03F7/00
Abstract: A nano-imprinting stamp may include a base substrate, an imprint pattern provided on the base substrate, and an alignment pattern provided on the base substrate adjacent to the imprint pattern, the alignment pattern, each of which has a different shape from the imprint pattern. The base substrate may include a groove region formed between the imprint pattern and the alignment pattern in which a top surface of the imprint pattern being lower than a bottom surface of the alignment pattern.
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