公开(公告)号：US20160131593A1

公开(公告)日：2016-05-12

申请号：US14669567

申请日：2015-03-26

Applicant: Samsung Display Co., Ltd.

Inventor： Ohjune Kwon ,  Minho Ryu ,  Minjeong Kim ,  Taewook Kang ,  Seungyong Song ,  Jeonggeun Yoo

IPC: G01N21/88 ,  H01L27/32 ,  H01L51/56 ,  G01B9/02 ,  H01L21/66

CPC classification number: G01N21/8851 ,  G01B9/02049 ,  G01B9/02077 ,  G01B9/02087 ,  G01B11/2518 ,  G01N21/8422 ,  G01N21/95 ,  G01N21/95607 ,  G01N2021/8438 ,  H01L22/26 ,  H01L27/3244 ,  H01L51/0031 ,  H01L51/56 ,  H01L2227/323

Abstract: A surface inspection apparatus and method, and a method of manufacturing a display device are disclosed. In one aspect, the surface inspection method includes placing an object on a stage comprising a top surface inclined at a predetermined angle with respect to a plane having a first direction and a second direction crossing the first direction. The method also includes irradiating light onto the object via a surface inspection unit. The method also includes obtaining a first image comprising first interference fringes captured by the imaging device, moving at least one of the surface inspection unit and the stage in at least one of the first and second directions, obtaining a second image including second interference fringes captured by the imaging device, and moving the surface inspection unit in the third direction so as to correct movement of the second interference fringes with respect to the first interference fringes.

Abstract translation: 公开了一种表面检查装置和方法以及显示装置的制造方法。 一方面，表面检查方法包括将物体放置在平台上，所述平台包括相对于具有与第一方向交叉的第一方向和第二方向的平面以预定角度倾斜的顶表面。 该方法还包括经由表面检查单元将光照射到物体上。 该方法还包括获得包括由成像装置捕获的第一干涉条纹的第一图像，在第一和第二方向中的至少一个方向上移动表面检查单元和台中的至少一个，获得包括捕获的第二干涉条纹的第二图像 并且使表面检查单元沿第三方向移动，以便校正第二干涉条纹相对于第一干涉条纹的移动。