公开(公告)号：US11590542B2

公开(公告)日：2023-02-28

申请号：US16918013

申请日：2020-07-01

Applicant: Samsung Display Co., Ltd.

Inventor： Yong-Hwan Ryu ,  Jiae Kim ,  Yunji Nam ,  Sun-Jin Song ,  In-Ja Han

IPC: B08B3/14 ,  B08B7/04 ,  H01L21/67 ,  C23C16/04 ,  H01L27/32 ,  H01L51/52

Abstract: A particle collection device includes a collection sheet and a frame on which the collection sheet is mounted. The collection sheet includes a base sheet, a magnetic substance, and a metal protrusion disposed on the base sheet to be adjacent to the magnetic substance.