公开(公告)号：US20240065085A1

公开(公告)日：2024-02-22

申请号：US18318828

申请日：2023-05-17

Applicant: Samsung Display Co., Ltd.

Inventor： SEUNGPYO HONG ,  HANUL KWEN

IPC: H10K71/16 ,  H10K59/12 ,  C23C14/04 ,  C23C16/04

CPC classification number: H10K71/166 ,  H10K59/1201 ,  H10K71/164 ,  C23C14/042 ,  C23C16/042

Abstract: A mask including a base sheet and at least one protrusion. The base sheet includes a first surface on which a target substrate is seated, a second surface that faces the first surface, and an inside surface portion that defines an opening formed through the first surface and the second surface. The at least one protrusion extends from a selected inside surface of the inside surface toward the opening, in a first region of the base sheet. The at least one protrusion includes a stepped surface. A gap between the stepped surface and the target substrate is greater than a gap between the first surface and the target substrate. The at least one protrusion is not provided extending from a non-selected inside surface of the inside surface portion in a second region of the base sheet.