公开(公告)号：US20200309452A1

公开(公告)日：2020-10-01

申请号：US16795109

申请日：2020-02-19

Applicant: Samsung Display Co., Ltd.

Inventor： Jung Wook LEE ,  Yeon Ju KWON ,  Do Hyun KIM ,  Jung Soo KIM ,  Ga Hee PARK ,  Ha Jun SONG ,  Do Yoon LEE ,  Hun Hyeon IM

IPC: F26B5/04 ,  F26B3/20 ,  G03F7/16

Abstract: A vacuum dryer including a chamber configured to provide an interior space, support pins in the interior space proximate to a bottom of the chamber, a power supply configured to supply power to the support pins, and a pump coupled to the interior space in the chamber.