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公开(公告)号：US10158074B2
公开(公告)日：2018-12-18
申请号：US15390908
申请日：2016-12-27
Applicant: Samsung Display Co., Ltd.
Inventor： Youngsun Cho , Daeyong Kim , Jongbum Kim , Jongho Yang , Yoonchan Oh
Abstract: An organic layer deposition assembly for depositing a deposition material on a substrate includes a deposition source configured to spray the deposition material, a deposition source nozzle arranged in one side of the deposition source and including deposition source nozzles arranged in a first direction, a patterning slit sheet arranged to face the deposition source nozzle and having patterning slits in a second direction that crosses the first direction, and a correction sheet arranged between the deposition source nozzle and the patterning slit sheet and configured to block at least a part of the deposition material sprayed from the deposition source.
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公开(公告)号：US11339471B2
公开(公告)日：2022-05-24
申请号：US16658910
申请日：2019-10-21
Applicant: Samsung Display Co., Ltd.
Inventor： Daeyong Kim , Sukbeom You , Sunwoo Kang , Youngmi Cho , Jinoh Kwag
Abstract: A deposition apparatus includes a chamber, a stage which is disposed within the chamber and on which a target substrate is seated, a deposition source disposed within the chamber and including a deposition material, a plurality of nozzles connected to the deposition source within the chamber to inject the deposition material in a direction of the stage, and an ionizer disposed between the nozzles and the stage to charge the deposition material injected from the nozzles. A first electric field is generated in each of the ionizer and the nozzles, and a second electric field having an intensity less than the first electric field is generated between the stage and the ionizer. Each of the nozzles includes a plurality of protrusion tips disposed on an inner surface of each of the nozzles to charge the deposition material.
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