公开(公告)号：US20170092666A1

公开(公告)日：2017-03-30

申请号：US15231932

申请日：2016-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： Doo Youl LEE ,  Chang Jung KIM

IPC: H01L27/12

CPC classification number: H01L27/1288 ,  H01L27/1225 ,  H01L27/1233 ,  H01L27/127 ,  H01L29/7869

Abstract: A manufacturing method of a thin film transistor array panel invention includes forming a semiconductor layer on a substrate including a display area and a peripheral area, arranging a photo mask including a first portion and a second portion having different transmittances from each other, the first portion corresponding to the display area and the second portion corresponding to the peripheral area, and patterning the semiconductor layer to form a first semiconductor disposed in the display area and a second semiconductor disposed in the peripheral area by using the photo mask, in which a thickness of the first semiconductor and a thickness of the second semiconductor are different from each other.