公开(公告)号：US20230349038A1

公开(公告)日：2023-11-02

申请号：US18347956

申请日：2023-07-06

Applicant: Samsung Display Co., LTD.

Inventor： Hyosung KIM ,  JinYoung CHOI ,  SUNGMIN HUR ,  HYUNSANG SEO ,  Hyun-Ju LEE ,  Manjae PARK ,  NARI AHN ,  HYEONGSUK YOO ,  DONGWON HAN

IPC: C23C16/04 ,  C22C38/08 ,  H10K50/844 ,  H10K59/12 ,  H10K71/00 ,  H10K71/10

CPC classification number: C23C16/042 ,  C22C38/08 ,  H10K50/844 ,  H10K59/12 ,  H10K71/00 ,  H10K71/10 ,  H10K59/1201

Abstract: A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.

公开(公告)号：US20250102418A1

公开(公告)日：2025-03-27

申请号：US18653831

申请日：2024-05-02

Applicant: Samsung Display Co., LTD.

Inventor： Woong KIM ,  Manjae PARK ,  Wanglim CHOI

IPC: G01N15/149 ,  B41J2/175 ,  B41J3/407 ,  G01N15/1434

Abstract: Provided are a system and method for measuring composition of ink droplets for a more precise fine inkjet printing process. The system includes a camera device configured to generate first image data including first ink droplets in a first target range among a plurality of ink droplets discharged onto and present on a substrate, a laser irradiation device configured to generate particles by irradiating each of the first ink droplets with laser beams, a particle suction component spaced apart from the substrate by a certain distance and including an inner surface which is a Coanda surface that is convex inward, a gas injection device configured to inject inert gas into the particle suction component to move the inert gas along the Coanda surface, and a mass spectrum measurement device configured to measure a mass spectrum of the particles extracted through the particle suction component with the inert gas.

公开(公告)号：US20210079518A1

公开(公告)日：2021-03-18

申请号：US16892415

申请日：2020-06-04

Applicant: Samsung Display Co., LTD.

Inventor： Hyosung KIM ,  JinYoung CHOI ,  SUNGMIN HUR ,  HYUNSANG SEO ,  Hyun-Ju LEE ,  Manjae PARK ,  NARI AHN ,  HYEONGSUK YOO ,  DONGWON HAN

IPC: C23C16/04 ,  H01L51/56 ,  H01L51/00 ,  H01L27/32 ,  H01L51/52 ,  C22C38/08

Abstract: A deposition mask includes a metal mask body in which a deposition opening is defined; and a coating layer including aluminum oxynitride, on an outer surface of the metal mask body.