公开(公告)号：US09733523B2

公开(公告)日：2017-08-15

申请号：US14289510

申请日：2014-05-28

Applicant: Samsung Display CO., LTD.

Inventor： Yeon-Jae Lee ,  Min-Soo Kim ,  Tae-Jin Kim ,  Hee-Chang Yang ,  Eun-Ho Jung

IPC: G21K5/08 ,  G02F1/1337 ,  G02F1/13

CPC classification number: G02F1/133788 ,  G02F1/1303

Abstract: An exposure method includes loading a first substrate on a loading portion , the first substrate having a photo alignment agent which is coated on the first substrate, irradiating the first substrate by moving the first substrate in a first speed in a first direction to a working portion while loading a second substrate on the loading portion, the working portion having an ultra violet light source generating ultra violet ray to harden a photo alignment agent, simultaneously irradiating the first substrate and the second substrate by moving the first substrate and the second substrate in the first direction in the working portion, and unloading the first substrate from an unloading portion while irradiating the second substrate by moving the second substrate in the first direction in the working portion.