公开(公告)号：US20240278379A1

公开(公告)日：2024-08-22

申请号：US18568469

申请日：2022-05-12

Applicant: SUMCO Corporation

Inventor： Ryo KURAMOTO ,  Taiki GOTO

IPC: B24B37/005 ,  B24B37/08 ,  B24B49/10

CPC classification number: B24B37/005 ,  B24B37/08 ,  B24B49/10

Abstract: Based on the relational data that indicates the relationship between inter-plate distance, which is a distance between the upper plate and the lower plate at two or more positions where distances from the center of the rotating plate are different, and the flatness of the work, the optimal value of the inter-plate distance is calculated.