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公开(公告)号:US20220005850A1
公开(公告)日:2022-01-06
申请号:US17363345
申请日:2021-06-30
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Alain INARD , Marios BARLAS
IPC: H01L27/146 , H01L31/0232
Abstract: An optoelectronic device includes a photodiode. At least a portion of an active area of the photodiode is separated from a neighboring photodiode by a first wall including a conductive core and an insulating sheath and by a second optical insulation wall. The first wall and second optical insulation wall further extend parallel to each other and separate the active area from a memory area of the photodiode.
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公开(公告)号:US20230408738A1
公开(公告)日:2023-12-21
申请号:US18361634
申请日:2023-07-28
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Vincent FARYS , Alain INARD , Olivier NOBLANC
CPC classification number: G02B5/0263 , C23C16/345 , G02B5/0268 , C23C18/1208 , G02B5/0236 , C23C16/56
Abstract: Methods of manufacture of an optical diffuser. In one embodiment, an optical diffuser is formed by providing a wafer including a silicon slice of which an upper face is covered with a first layer made of a first material itself covered with a second layer made of a second selectively etchable material with respect to the first material. The method further includes forming openings in the second layer extending up to the first layer and filling the openings in the second layer with a third material. The method yet further includes bonding a glass substrate to the wafer on the side of its upper face and removing the silicon slice.
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公开(公告)号:US20220011479A1
公开(公告)日:2022-01-13
申请号:US17482237
申请日:2021-09-22
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Vincent FARYS , Alain INARD , Olivier NOBLANC
Abstract: Methods of manufacture of an optical diffuser. In one embodiment, an optical diffuser is formed by providing a wafer including a silicon slice of which an upper face is covered with a first layer made of a first material itself covered with a second layer made of a second selectively etchable material with respect to the first material. The method further includes forming openings in the second layer extending up to the first layer and filling the openings in the second layer with a third material. The method yet further includes bonding a glass substrate to the wafer on the side of its upper face and removing the silicon slice.
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公开(公告)号:US20230352513A1
公开(公告)日:2023-11-02
申请号:US18303409
申请日:2023-04-19
Applicant: STMicroelectronics (Crolles 2) SAS
Inventor: Alain INARD , Emmanuel JOSSE
IPC: H01L27/146
CPC classification number: H01L27/14636 , H01L27/14634 , H01L27/1469 , H01L24/29
Abstract: The present description concerns a manufacturing method comprising the following steps: providing a silicon substrate having a via penetrating into the substrate from its front surface and comprising a silicon conductive core and a silicon oxide insulating sheath; etching the substrate from its rear surface, selectively over the sheath so that a portion of said at least one via protrudes from the rear surface; depositing a silicon oxide insulating layer on the rear surface; polishing the insulating layer to expose the core while leaving in place a portion of the thickness of the insulating layer; and forming a conductive electrode in contact with the core.
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公开(公告)号:US20180143357A1
公开(公告)日:2018-05-24
申请号:US15610150
申请日:2017-05-31
Applicant: STMICROELECTRONICS (CROLLES 2) SAS
Inventor: Vincent FARYS , Alain INARD , Olivier NOBLANC
CPC classification number: G02B5/0263 , C23C16/345 , C23C16/56 , C23C18/1208 , G02B5/0236 , G02B5/0268
Abstract: Methods of manufacture of an optical diffuser. In one embodiment, an optical diffuser is formed by providing a wafer including a silicon slice of which an upper face is covered with a first layer made of a first material itself covered with a second layer made of a second selectively etchable material with respect to the first material. The method further includes forming openings in the second layer extending up to the first layer and filling the openings in the second layer with a third material. The method yet further includes bonding a glass substrate to the wafer on the side of its upper face and removing the silicon slice.
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