Semiconductor Device and Method of Forming Embedded Conductive Layer for Power/Ground Planes in FO-EWLB
    4.
    发明申请
    Semiconductor Device and Method of Forming Embedded Conductive Layer for Power/Ground Planes in FO-EWLB 有权
    在FO-EWLB中形成电源/接地平面的嵌入式导电层的半导体器件和方法

    公开(公告)号:US20140252573A1

    公开(公告)日:2014-09-11

    申请号:US14193267

    申请日:2014-02-28

    Abstract: A semiconductor device has a first conductive layer and a semiconductor die disposed adjacent to the first conductive layer. An encapsulant is deposited over the first conductive layer and semiconductor die. An insulating layer is formed over the encapsulant, semiconductor die, and first conductive layer. A second conductive layer is formed over the insulating layer. A first portion of the first conductive layer is electrically connected to VSS and forms a ground plane. A second portion of the first conductive layer is electrically connected to VDD and forms a power plane. The first conductive layer, insulating layer, and second conductive layer constitute a decoupling capacitor. A microstrip line including a trace of the second conductive layer is formed over the insulating layer and first conductive layer. The first conductive layer is provided on an embedded dummy die, interconnect unit, or modular PCB unit.

    Abstract translation: 半导体器件具有邻近第一导电层设置的第一导电层和半导体管芯。 密封剂沉积在第一导电层和半导体管芯上。 绝缘层形成在密封剂,半导体管芯和第一导电层之上。 在绝缘层上形成第二导电层。 第一导电层的第一部分电连接到VSS并形成接地平面。 第一导电层的第二部分电连接到VDD并形成电源平面。 第一导电层,绝缘层和第二导电层构成去耦电容器。 在绝缘层和第一导电层上形成包括第二导电层的迹线的微带线。 第一导电层设置在嵌入的虚设裸片,互连单元或模块化PCB单元上。

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