METHOD AND APPARATUS FOR CHARACTERISING AN OBJECT

    公开(公告)号:US20240094123A1

    公开(公告)日:2024-03-21

    申请号:US18274629

    申请日:2021-02-04

    CPC classification number: G01N21/4788

    Abstract: A method for characterising an object, including: providing, via a support plane, coherent incident radiation at the object at each of a plurality of radiation configurations, detecting, at a detector, an intensity of radiation scattered by the object for each radiation configurations, and determining, via an iterative process, an object transmission function associated with the object in dependence on the detected intensity of radiation for each radiation configurations. The iterative process comprises estimating, for each radiation configurations, an entrance wave function and an exit wave function, a support constraint and a current estimate of the object transmission function, determining a ratio of a sum of intensities of the exit wave function for the plurality of radiation configurations to a sum of intensities of the entrance wave function therefor, and updating the estimate of the object transmission function in dependence on the determined ratio and an amplitude constraint.

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