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公开(公告)号:US20240094123A1
公开(公告)日:2024-03-21
申请号:US18274629
申请日:2021-02-04
Inventor: Fucai ZHANG , Bingyang WANG
IPC: G01N21/47
CPC classification number: G01N21/4788
Abstract: A method for characterising an object, including: providing, via a support plane, coherent incident radiation at the object at each of a plurality of radiation configurations, detecting, at a detector, an intensity of radiation scattered by the object for each radiation configurations, and determining, via an iterative process, an object transmission function associated with the object in dependence on the detected intensity of radiation for each radiation configurations. The iterative process comprises estimating, for each radiation configurations, an entrance wave function and an exit wave function, a support constraint and a current estimate of the object transmission function, determining a ratio of a sum of intensities of the exit wave function for the plurality of radiation configurations to a sum of intensities of the entrance wave function therefor, and updating the estimate of the object transmission function in dependence on the determined ratio and an amplitude constraint.