Soldering Apparatus And Method Of Detecting Failures Of Gasket

    公开(公告)号:US20210402498A1

    公开(公告)日:2021-12-30

    申请号:US17328197

    申请日:2021-05-24

    Abstract: Provided is a soldering apparatus including: a furnace body including a processing chamber in which boards are processed; a gasket provided at least to a part of the furnace body, and configured to seal the furnace body; a sealed space isolated from the processing chamber, and defined by the furnace body and the gasket; a gas supply apparatus configured to supply a first gas into the sealed space; and a measuring apparatus configured to measure one of pressure in the sealed space and concentration of a second gas in the sealed space.

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