Device packaging facility and method, and device processing apparatus utilizing DEHT

    公开(公告)号:US10937757B2

    公开(公告)日:2021-03-02

    申请号:US16372420

    申请日:2019-04-02

    申请人: SEMIgear, Inc.

    IPC分类号: H01L23/00 H01L21/66 B23K1/20

    摘要: Provided are a device packing facility and method using DEHT and a device processing apparatus utilizing the DEHT. The device packaging facility includes a mounting unit providing bis(2-ethylhexyl) terephthalate (DEHT) between first and second devices to attach the first and second devices to each other, a processing unit thermally processing the first and second devices that are attached to each other to remove the DEHT and fix the first and second devices to each other, and a transfer unit transferring the first and second devices that are attached to each other from the mounting unit to the processing unit.