-
公开(公告)号：US10391769B2
公开(公告)日：2019-08-27
申请号：US16015447
申请日：2018-06-22
发明人： Ichiro Asaoka , Hiromu Miyazawa , Masayuki Omoto , Toshiki Hara , Toshihiro Shimizu , Akira Kuriki
IPC分类号： B41J2/14 , H01L41/047 , H01L41/09 , H01L41/187
摘要： Provided is a liquid ejecting head that ejects a liquid in a pressure chamber by a piezoelectric device, the piezoelectric device including a vibration plate, a piezoelectric layer containing lead, a first electrode provided between the vibration plate and the piezoelectric layer, and a second electrode provided on a side opposite to a side of the first electrode as viewed from the piezoelectric layer. The piezoelectric layer is preferentially oriented in a (100) plane, a lattice constant c defined by a crystal plane of the piezoelectric layer parallel to a film surface of the piezoelectric layer and a lattice constant a defined by a crystal plane perpendicular to the film surface satisfy 0.9945≤c/a≤1.012, and the thickness of the piezoelectric device is twice or more the thickness t (t
-
公开(公告)号：US10096766B2
公开(公告)日：2018-10-09
申请号：US15812816
申请日：2017-11-14
发明人： Masayuki Omoto , Toshiki Hara , Ichiro Asaoka
IPC分类号： B41J2/14 , H01L41/187 , G01N23/085
摘要： A method for evaluating a piezoelectric film containing a perovskite oxide containing a lead atom, a zirconium atom, and a titanium atom, and the method includes a process of irradiating the piezoelectric film with X-rays to acquire an extended X-ray absorption fine structure (EXAFS) spectrum at the L3 absorption edge of the lead atom, a process of Fourier-transforming the extended X-ray absorption fine structure (EXAFS) spectrum to acquire a radial distribution function, and a process of acquiring the intensity of a first peak having a distance from the lead atom of 1.4±0.2 Å, the intensity of a second peak having a distance from the lead atom of 2.0±0.2 Å, and the intensity of a third peak having a distance from the lead atom of 2.6±0.2 Å from the radial distribution function, and then evaluating the film quality of the piezoelectric film from a value obtained by dividing the intensity of the first peak by the intensity of the second peak and a value obtained by dividing the intensity of the first peak by the intensity of the third peak.
-
公开(公告)号：US09735335B2
公开(公告)日：2017-08-15
申请号：US15153007
申请日：2016-05-12
发明人： Takayuki Yonemura , Toshiki Hara
IPC分类号： H01L31/058 , H01L37/02 , G01J5/12 , G01J5/34
CPC分类号： H01L37/025 , G01J5/12 , G01J5/34
摘要： A thermoelectric conversion element includes a first electrode on provided a substrate; a pyroelectric film that is provided on the first electrode, is formed of a composite oxide having an ABO3-type perovskite structure, and generates a surface charge due to temperature change; and a second electrode provided on the pyroelectric film, in which the composite oxide which forms at least a portion of layer in the pyroelectric film contains at least Pb, Nb, and Ti, and is formed of tetragonal crystal which is oriented in the direction of {100} on the substrate.
-
-
搜索结果
3 条记录 (耗时 0.014 秒)
