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公开(公告)号：US3129463A
公开(公告)日：1964-04-21
申请号：US14134861
申请日：1961-09-28
Applicant: SCULLY ANTHONY CORP
Inventor： GILL JR ROBERT F , KRIEGER ROLAND E
CPC classification number: H01L21/52 , H01J5/40 , H01J5/42 , H01J2893/0034 , H01J2893/0035
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