公开(公告)号：US20240124972A1

公开(公告)日：2024-04-18

申请号：US18133909

申请日：2023-04-12

Applicant: SAMSUNG ELECTRONICS Co., LTD.

Inventor： Kyungrim KIM ,  Dowon KIM ,  Sunja KIM ,  Youngeun KIM

IPC: C23C16/448 ,  C23C16/455 ,  C23C16/52

CPC classification number: C23C16/4481 ,  C23C16/45527 ,  C23C16/45544 ,  C23C16/45553 ,  C23C16/52

Abstract: A canister supplying a precursor to a processing chamber includes a body, a first valve introducing a carrier gas into the body, a second valve discharging a sublimated gas of a solid precursor into a processing chamber, a precursor accommodating tray accommodating the solid precursor, and at least one piezoelectric transducer at least one of vibrating the precursor accommodating tray or measuring a resonance frequency.