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公开(公告)号:US20240304484A1
公开(公告)日:2024-09-12
申请号:US18525803
申请日:2023-11-30
Applicant: SAMSUNG ELECTRONICS CO. LTD.
Inventor: Hyeon Uk KIM , Kyoung Soo KIM , Kun Jin RYU , Gyeong Dam BAEK , Seung Hyuk BAEK , Dong Chan SEO , Hu Jong LEE , Jae Hyuk CHA , Ji Won YOON , Sun Oh KIM , Kyeong Jun MIN , Ji Wook KWON , Seung Seok HA , Gil Do KIM
IPC: H01L21/677 , H01L21/67
CPC classification number: H01L21/6773 , H01L21/67259 , B25J11/0095
Abstract: A stocker system including a stocker apparatus, a transfer robot including a sensing module and a robot arm, a manual port of the stocker apparatus, and a controller in communication with the transfer robot, wherein the controller communicates with the sensing module to determine that a container is transferrable by the robot arm between the manual port of the stocker apparatus and the transfer robot.