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公开(公告)号:US20180182807A1
公开(公告)日:2018-06-28
申请号:US15905007
申请日:2018-02-26
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Yong-Chan KIM , Seung-Sik KIM , Eun-Sub SHIM , Moo-Sup LIM
IPC: H01L27/146 , H04N5/355 , H01L27/148
CPC classification number: H01L27/14683 , H01L27/14614 , H01L27/14621 , H01L27/14627 , H01L27/1463 , H01L27/14638 , H01L27/1464 , H01L27/14689 , H01L27/14806 , H04N5/3559
Abstract: Provided are a unit pixel, an image sensor including the same, a portable electronic device including the same, and a method of manufacturing the same. The method of manufacturing includes: forming a photoelectric conversion region in a substrate; forming, in the substrate, a first floating diffusion region spaced apart from the photoelectric conversion region of the substrate, and a second floating diffusion region spaced apart from the first floating diffusion region; forming a first recess spaced apart from the first floating diffusion region and the second floating diffusion region by removing a portion of the substrate from a first surface of the substrate; filling the first recess to form a dual conversion gain (DCG) gate that extends perpendicularly or substantially perpendicularly from the first surface of the substrate; and forming a conductive layer to fill an inside of the first recess.