公开(公告)号：US20230375463A1

公开(公告)日：2023-11-23

申请号：US18082040

申请日：2022-12-15

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seoyeon JEONG ,  Seungwoo LEE ,  Inho SHIN ,  Wookrae KIM ,  Myungjun LEE ,  Jaehwang JUNG

IPC: G01N21/21 ,  G02B27/28 ,  G01N21/956 ,  G01B11/24

CPC classification number: G01N21/211 ,  G02B27/283 ,  G01N21/956 ,  G01B11/2441 ,  G01B2210/56

Abstract: A semiconductor measurement apparatus includes an illumination unit configured to provide illumination light including linearly polarized light beams having different wavelengths, an optical unit including an objective lens configured to allow the illumination light to be incident on a sample, the optical unit being configured to transmit reflection light generated when the illumination light is reflected from the sample, a self-interference generator configured to self-interfere the reflection light transmitted from the optical unit and transmit the reflection light to a first image sensor, for each wavelength, and a controller. The controller is configured to process a measurement image output by the image sensor to divide the measurement image into a first image representing an intensity ratio of a polarization component of the reflection light and a second image representing a phase difference of the polarization component of the reflection light, for each wavelength.