公开(公告)号：US20240077507A1

公开(公告)日：2024-03-07

申请号：US18234692

申请日：2023-08-16

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seonhwa Go ,  Younghye Kim ,  Jiyun Lim ,  Sangyoon Shin

IPC: G01N35/02 ,  G01N35/10

CPC classification number: G01N35/025 ,  G01N35/1009 ,  G01N2035/0465

Abstract: A sample analysis apparatus includes a first chamber that performs a first heating process for heating a small sample and a second chamber including a second chamber housing in which a second heating process for heating a wafer sample is performed. The first chamber includes a first chamber housing in which the first heating process is performed, a first support that supports the small sample, a first heating device that heats the small sample, an accommodation housing in which the small sample is accommodated, a sample tray arranged in the accommodation space, sample container configured to store the small sample, and a transfer module configured to transfer the sample container and the small sample from the accommodation housing to the first chamber.