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公开(公告)号：US20190363914A1
公开(公告)日：2019-11-28
申请号：US16288550
申请日：2019-02-28
发明人： YOSHIHIKO HAYASHI , SHINYA NAMIOKA , CHANG EUN LEE , SUNG-YEOL KIM , SI YOUNG KOH , HYUNG-SUN RYU , JANG YEOB LEE , SHIN Kl JEONG
摘要： A semiconductor device including a signal generator and decoding and timing skew adjusting circuit is provided. The signal generator is configured to receive n multi-level signals having m signal levels and convert the n multi-level signals into n*(m−1) single level signals having two signal levels. The decoding and timing skew adjusting circuit is configured to receive the single level signals, perform a predefined operation on the single level signals to generate an output signal, and compensate for timing skew between the n multi-level signals, using the single level signals. The n and m are natural numbers, where n>=2 and m>=3.
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公开(公告)号：US20220181219A1
公开(公告)日：2022-06-09
申请号：US17394471
申请日：2021-08-05
发明人： MEEHYUN LIM , SUNG-YEOL KIM , SUNGHYUP KIM , HYUNG-JUNG YONG
IPC分类号： H01L21/66 , G01N21/25 , G01N21/27 , G01N21/3586 , G01N21/3504 , H01J37/32 , H01L21/683
摘要： A plasma treatment apparatus includes a light generator that generates light, a chamber that receives the light generated from the light generator, an optical element provided between the light generator and the chamber, a light detector that detects the light reflected in the chamber, and a controller connected to the light generator and the light detector. The chamber includes an electrostatic chuck provided in a lower portion of the chamber, an edge ring provided around the electrostatic chuck, an outer wall for sealing an inner space of the chamber, and a gas supply that injects a process gas into the chamber. The optical element branches the generated light to irradiate branched light to different regions of the chamber.
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公开(公告)号：US20180109184A1
公开(公告)日：2018-04-19
申请号：US15584486
申请日：2017-05-02
发明人： SEONG-KWAN LEE , SUNG-CHUL CHUN , SUNG-YEOL KIM , JAE-HONG KIM
CPC分类号： H02M3/156 , G01R1/30 , G01R31/40 , H02M3/02 , H02M2001/0045 , H02M2001/0067 , H02M2001/008
摘要： A power supply apparatus includes first through M-th switching regulators, first through N-th multiplexers, and first through N-th linear regulators, where each of M and N is a natural number greater than or equal to two. The first through M-th switching regulators generate first through M-th reference power signals using an input power signal. The first through N-th multiplexers select one of the first through M-th reference power signals, in response to a power selection signal, to provide first through N-th selection power signals. The first through N-th linear regulators generate first through N-th output power signals using the first through N-th selection power signals. The first through N-th linear regulators are connected to the first through N-th multiplexers, respectively.
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