公开(公告)号：US20160336858A1

公开(公告)日：2016-11-17

申请号：US15132469

申请日：2016-04-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： TAKAHIRO NOMIYAMA ,  ILYOUNG SOHN ,  SUHO LEE ,  MINSOO CHO ,  JAEYEOL HAN

IPC: H02M3/158 ,  H03K5/24 ,  H03K3/3565 ,  H03K17/687

CPC classification number: H02M3/158 ,  H02M2001/0025 ,  H02M2003/1566 ,  H03K5/24

Abstract: A power converting circuit includes a voltage converting circuit, a feedback circuit, a driving signal generator, a transient state detector, and a resistance value adjuster. The voltage converting circuit changes a voltage level of an input voltage in response to a driving signal, and outputs an output voltage according to the changed voltage level of the input voltage. The feedback circuit divides the output voltage to output the divided output voltage as a feedback voltage. The driving signal generator compares a level of the feedback voltage with a level of a reference voltage and outputs the driving signal. The transient state detector compares the level of the feedback voltage with the level of the reference voltage and outputs a transient state signal corresponding to a transient state of the output voltage. The resistance value adjuster adjusts the feedback resistance value, which divides the output voltage, in response to the transient state signal.

Abstract translation: 电力转换电路包括电压转换电路，反馈电路，驱动信号发生器，瞬态状态检测器和电阻值调节器。 电压转换电路响应于驱动信号改变输入电压的电压电平，并且根据输入电压的改变的电压电平输出输出电压。 反馈电路分压输出电压，将分压输出电压输出为反馈电压。 驱动信号发生器将反馈电压的电平与参考电压的电平进行比较，并输出驱动信号。 瞬态状态检测器将反馈电压的电平与参考电压的电平进行比较，并输出与输出电压的过渡状态对应的瞬态状态信号。 电阻值调节器根据瞬态状态信号调整反馈电阻值，该值反映输出电压。

公开(公告)号：US20150167705A1

公开(公告)日：2015-06-18

申请号：US14463166

申请日：2014-08-19

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SOYOUNG LEE ,  SUHO LEE ,  CHANG-YUN LEE ,  IKSOO KIM ,  JUHYUN LEE ,  JONGWON HONG

IPC: F15D1/00 ,  H01J37/32 ,  C23C16/50 ,  C23C16/455

CPC classification number: H01J37/32449 ,  C23C16/45565 ,  C23C16/45574 ,  C23C16/45589 ,  C23C16/45591 ,  C23C16/50 ,  H01J37/32357 ,  H01J37/3244 ,  H01J37/32807

Abstract: A substrate treating apparatus includes a chamber that encloses an internal space; a susceptor in a lower part of the internal space; a shower head in an upper part of the internal space and spaced above the susceptor and that includes a plurality of distribution holes; and a blocker plate assembly that comprises a body having a plurality of intake holes that divides a space between a top wall of the chamber and the shower head into an upper intake space and a lower distribution space, a ring-shaped partition rib on an upper surface of the body, and a ring-shaped distribution unit on a lower surface of the body.

Abstract translation: 基板处理装置包括封闭内部空间的室; 在内部空间的下部的基座; 位于所述内部空间的上部并且在所述基座上方间隔并包括多个分配孔的淋浴喷头; 以及阻挡板组件，其包括具有多个进气孔的主体，所述多个进气孔将所述腔室的顶壁和所述喷淋头之间的空间分成上进气空间和下分配空间，上部的环形分隔肋 身体的表面，以及在身体的下表面上的环形分配单元。