公开(公告)号：US20230360881A1

公开(公告)日：2023-11-09

申请号：US18139639

申请日：2023-04-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Kwangyoung Jung ,  Youngmin Min ,  Jungan Kwon ,  Gillhoon Shin ,  Keechun Shim ,  Daeseong Ha ,  Kyoungsuk Kim ,  Seungmin Ryu ,  Hyunsuk Park ,  Jiho Uh ,  Hyunjoon Ohn ,  Hyeseon Lee

IPC: H01J37/32

CPC classification number: H01J37/32082 ,  H01J2237/334 ,  H01J2237/24585 ,  H01J2237/24564

Abstract: A radio frequency (RF) generator including a carbonization prevention system includes a casing on which an intake fan and an interlock are mounted, an alternating current (AC) power supply, a power supply, a power amplifier (PA), a coupler provided between the PA and the RF output connector, and a control board that controls an amount of DC power output to the PA according to the calculated values. The carbonization prevention system detects smoke generated in the casing, measures a temperature and a humidity in the casing, and generates and transmits a control signal to the control board and an operation control signal to the interlock according to a reading result.

公开(公告)号：US11264291B2

公开(公告)日：2022-03-01

申请号：US16822319

申请日：2020-03-18

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seeyub Yang ,  Jeongil Mun ,  Hyungjoo Lee ,  Kyoungsuk Kim ,  Kyeonghun Kim ,  Jongwoo Sun

IPC: H01J37/32 ,  H01L21/66 ,  H01L21/67 ,  H01L21/311

Abstract: An etching apparatus includes a reaction chamber having an internal space, a fixing chuck disposed in the reaction chamber, an electrostatic chuck disposed on the fixing chuck and on which a wafer is placed, a focus ring surrounding the electrostatic chuck, and a sensor device configured to be transferred into or out of the reaction chamber and placed on the electrostatic chuck. The sensor device includes a body having a plate shape, and a sensor disposed on an upper surface of the body which senses whether the focus ring is worn.