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公开(公告)号:US20190086794A1
公开(公告)日:2019-03-21
申请号:US15942795
申请日:2018-04-02
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Ho YU , Myoung-soo CHOI , Dong-wook KIM , Jung-wook KIM , Ki-ju SOHN , Sung-kyu LEE , Eun-soo HWANG
Abstract: An imprint apparatus including a stage supporting a stamp master on which a master pattern for forming a stamping pattern on a flexible substrate is formed, or a substrate on which a pattern corresponding to the stamping pattern is formed by contact with the stamping pattern; a roll-to-roll mover to move the flexible substrate along a path adjacent to the stage; a clamp including a front clamp that secures a first portion of the flexible substrate, and a rear clamp that secures a second portion of the flexible substrate spaced apart from the first portion; a pressure roller to press the flexible substrate so that the flexible substrate secured by the clamp is brought into contact with the substrate or the stamp master; and a clamp driving controller to drive the clamp to adjust tension between the first portion and the second portion.
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2.
公开(公告)号:US20190049837A1
公开(公告)日:2019-02-14
申请号:US15869976
申请日:2018-01-12
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Dong-wook KIM , Ju-hyun LEE , Byeong-sang KIM , Kyung-bin PARK , Ki-ju SOHN , Ho YU
IPC: G03F7/00
Abstract: A film frame, a system for manufacturing a display substrate, and a method of manufacturing a display substrate, the film frame including a pair of frame edges extending lengthwise in a first direction and arranged opposite to each other; a fixed end clamp connected to the pair of frame edges and extending lengthwise in a second direction perpendicular to the first direction; and a free end clamp between the pair of frame edges, the free end clamp extending lengthwise in the second direction and configured to be detachably coupled with the pair of frame edges, wherein the fixed end clamp includes a first magnetic fixer extending lengthwise in the second direction and a second magnetic fixer on the first magnetic fixer, and the free end clamp includes a third magnetic fixer extending lengthwise in the second direction and a fourth magnetic fixer on the third magnetic fixer.
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