公开(公告)号：US20190086794A1

公开(公告)日：2019-03-21

申请号：US15942795

申请日：2018-04-02

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ho YU ,  Myoung-soo CHOI ,  Dong-wook KIM ,  Jung-wook KIM ,  Ki-ju SOHN ,  Sung-kyu LEE ,  Eun-soo HWANG

IPC: G03F7/00 ,  B29C33/38 ,  B29C43/58 ,  B29C43/36 ,  B29C43/50

Abstract: An imprint apparatus including a stage supporting a stamp master on which a master pattern for forming a stamping pattern on a flexible substrate is formed, or a substrate on which a pattern corresponding to the stamping pattern is formed by contact with the stamping pattern; a roll-to-roll mover to move the flexible substrate along a path adjacent to the stage; a clamp including a front clamp that secures a first portion of the flexible substrate, and a rear clamp that secures a second portion of the flexible substrate spaced apart from the first portion; a pressure roller to press the flexible substrate so that the flexible substrate secured by the clamp is brought into contact with the substrate or the stamp master; and a clamp driving controller to drive the clamp to adjust tension between the first portion and the second portion.