OVERLAY MEASUREMENT DEVICE AND OVERLAY MEASUREMENT METHOD

    公开(公告)号:US20250045909A1

    公开(公告)日:2025-02-06

    申请号:US18435692

    申请日:2024-02-07

    Abstract: An overlay measurement device includes a light source configured to direct an illumination to an overlay measurement target, a lens assembly configured to condense the illumination at a measurement position at any one point on the overlay measurement target, a detector configured to obtain a plurality of target overlay images through a beam reflected from the measurement position, a controller configured to determine at least one of a first similarity coefficient and a second similarity coefficient for each of the plurality of target overlay images and determine a defective overlay image from among the plurality of target overlay images based on at least one of the first similarity coefficient and the second similarity coefficient for each of the plurality of target overlay images, and a memory configured to store a normal overlay image and defect data corresponding to the defective overlay image.

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