公开(公告)号：US20200075853A1

公开(公告)日：2020-03-05

申请号：US16364232

申请日：2019-03-26

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： SEUNG-GEUN YU ,  ZHU WU ,  JA BIN LEE ,  JUNG MOO LEE ,  JINWOO LEE ,  KYUBONG JUNG

IPC: H01L45/00 ,  H01L27/24

Abstract: A switching element includes a lower barrier electrode on a substrate, a switching pattern on the lower barrier electrode, and an upper barrier electrode on the switching pattern. The lower barrier electrode includes a first lower barrier electrode layer, and a second lower barrier electrode layer interposed between the first lower barrier electrode layer and the switching pattern and whose density is different from the density of the first lower barrier electrode.