公开(公告)号：US20250087464A1

公开(公告)日：2025-03-13

申请号：US18590406

申请日：2024-02-28

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Jaehyun SOH ,  Wookhyeon KWON ,  Chulwoo PARK ,  Dongkyu SHIN ,  Hoontaek LEE ,  Minnhoo CHOI ,  Yongwoo KIM ,  Jaehyun KIM ,  Hansol KIM ,  Deukho LEE ,  Junghyun CHO ,  Yangyeon CHU ,  Uzun KAAN

IPC: H01J37/32

Abstract: An embodiment provides a focus ring alignment apparatus including a frame, a sensing member that is connected to the frame and is configured to acquire images of a focus ring within in a substrate processing apparatus, and an alignment module that is connected to the frame and is configured to move the focus ring to change a position of the focus ring.