公开(公告)号：US10446575B2

公开(公告)日：2019-10-15

申请号：US16014902

申请日：2018-06-21

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chan-Ho Kim ,  Bong-Soon Lim ,  Pan-Suk Kwak ,  Hong-Soo Jeon

IPC: H01L29/76 ,  H01L27/115 ,  H01L27/11582 ,  H01L27/11573 ,  G11C16/08 ,  G11C16/24 ,  H01L27/1157

Abstract: A three-dimensional (3D) nonvolatile memory includes a stacked structure that includes a plurality of conductive layers that alternate with and are spaced apart from each other by a plurality of interlayer insulating layers. The stacked structure includes a first cell region, a second cell region spaced apart from the first cell region, and a connection region between the first cell region and the second cell region. The connection region includes a first step portion that contacts the first cell region and has a stepped shape that descends in a direction approaching the second cell region, a second step portion that contacts the second cell region and has a stepped shape that descends in a direction approaching the first cell region, and a connection portion that connects the first cell region and the second cell region.

公开(公告)号：US20190139978A1

公开(公告)日：2019-05-09

申请号：US16014902

申请日：2018-06-21

Applicant: Samsung Electronics Co., Ltd

Inventor： CHAN-HO KIM ,  Bong-Soon Lim ,  Pan-Suk Kwak ,  Hong-Soo Jeon

IPC: H01L27/11582 ,  H01L27/11573 ,  H01L27/1157 ,  G11C16/24 ,  G11C16/08

Abstract: A three-dimensional (3D) nonvolatile memory includes a stacked structure that includes a plurality of conductive layers that alternate with and are spaced apart from each other by a plurality of interlayer insulating layers. The stacked structure includes a first cell region, a second cell region spaced apart from the first cell region, and a connection region between the first cell region and the second cell region. The connection region includes a first step portion that contacts the first cell region and has a stepped shape that descends in a direction approaching the second cell region, a second step portion that contacts the second cell region and has a stepped shape that descends in a direction approaching the first cell region, and a connection portion that connects the first cell region and the second cell region.