公开(公告)号：US10139249B2

公开(公告)日：2018-11-27

申请号：US15693748

申请日：2017-09-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hong Won Kim ,  Ho Hyun Lee

IPC: G03F7/20 ,  G01D5/26

Abstract: A metrology system includes a timing estimator, a sensor, and a position estimator. The timing estimator receives a control signal transmitted at a first timing of a first control loop and estimates a second timing at which the control signal is transmitted in a second control loop subsequent to the first control loop. The sensor senses position information of a wafer. The position estimator estimates the position information of the wafer at the estimated second timing based on the sensed position information of the wafer and outputs the estimated position information of the wafer based on a position request signal.

公开(公告)号：US09495958B2

公开(公告)日：2016-11-15

申请号：US14096628

申请日：2013-12-04

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Hong Won Kim ,  Woo Sup Han

IPC: G10L15/18 ,  G06F17/28

CPC classification number: G10L15/1822 ,  G06F17/28 ,  G10L15/1815

Abstract: A dialog system uses an extended domain in order to have a dialog with a user using natural language. If a dialog pattern actually input by the user is different from a dialog pattern predicted by an expert, an extended domain generated in real time based on user input is used and an extended domain generated in advance is used to have a dialog with the user.

Abstract translation: 对话系统使用扩展域，以便与使用自然语言的用户进行对话。 如果用户实际输入的对话模式与专家预测的对话模式不同，则使用基于用户输入实时生成的扩展域，并且使用预先生成的扩展域与用户进行对话。