公开(公告)号：US20230080436A1

公开(公告)日：2023-03-16

申请号：US17704701

申请日：2022-03-25

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chung-Ho YU ,  Hongsoo JEON

IPC: H01L23/535 ,  H01L27/11556 ,  H01L27/11529 ,  H01L27/11582 ,  H01L27/11573

Abstract: A semiconductor device includes; a first transistor on a substrate and including a first gate electrode, a second transistor on the substrate and including a second gate electrode adjacent to the first gate electrode, an electrode structure including electrodes vertically stacked on the first and second transistors and including first and second pads adjacent to in the first direction, first and second landing pads between the substrate and the electrode structure connected respectively to the first and second landing pads, a first penetration electrode penetrating the electrode structure to connect the first landing pad and the first pad, a second penetration electrode penetrating the electrode structure to connect the second landing pad and the second pad, and lower interconnection lines between the first landing pad and the second landing pad and extending in a second direction substantially perpendicular to the first direction.