公开(公告)号：US20230064084A1

公开(公告)日：2023-03-02

申请号：US17866805

申请日：2022-07-18

申请人： SAMSUNG ELECTRONICS CO., LTD.

发明人： MINHWAN JEON ,  Chanho Park ,  Kyung Rae Byun ,  Chang Kyu Lee ,  Chongkwang Chang

IPC分类号： H01L27/146

摘要： An image sensor including: a semiconductor substrate including a plurality of pixel regions; an anti-reflection layer on the semiconductor substrate; color filters provided on the anti-reflection layer and in the pixel regions; and a fence structure disposed between adjacent ones of the color filters, wherein the fence structure includes: a lower portion penetrating the anti-reflection layer; an upper portion on the anti-reflection layer; and an intermediate portion between the lower portion and the upper portion, wherein the fence structure has undercut regions, which are provided at both sides of the intermediate portion and are between the upper portion of the fence structure and a top surface of the anti-reflection layer.