公开(公告)号：US20240140089A1

公开(公告)日：2024-05-02

申请号：US18499012

申请日：2023-10-31

Applicant: Samsung Display Co., LTD.

Inventor： Chan Hae HWANG ,  Minkyu SHIN ,  Tae-Ho YOUN

IPC: B41J2/14

CPC classification number: B41J2/14

Abstract: A nozzle according to an embodiment includes: a metal portion, which defines a penetration hole therein; and a ceramic portion, which surrounds the metal portion, where the metal portion includes a first region and a second region having a narrower diameter than the first region, the ceramic portion surrounds the second region, and an end of the metal portion close to a discharging end of the nozzle is spaced apart from an end of the ceramic portion close to the discharging end.

公开(公告)号：US20180123486A1

公开(公告)日：2018-05-03

申请号：US15797488

申请日：2017-10-30

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Min Ho BAE ,  Byung-Moo KIM ,  Yun Soo KIM ,  Tae-Ho YOUN

IPC: H02N13/00 ,  H01L21/683

CPC classification number: H02N13/00 ,  H01L21/681 ,  H01L21/6831 ,  H01L21/6833 ,  H01L21/68757

Abstract: An electrostatic chuck and an electrostatic adsorption apparatus are provided. According to one or more exemplary embodiments, an electrostatic chuck includes: a main body portion including a body portion provided with a through-hole, and a transparent resin portion filled in the through-hole; a transparent cushion layer on the main body portion and covering the transparent resin portion; an electrode layer on the transparent cushion layer; and a dielectric layer on the electrode layer.