公开(公告)号：US12168823B2

公开(公告)日：2024-12-17

申请号：US17217489

申请日：2021-03-30

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Minho Moon ,  Sungsoon Im ,  Junho Jo ,  Seungyong Song

IPC: H10K71/16 ,  C23C14/04 ,  H10K71/00 ,  C23C14/24

Abstract: A mask assembly includes a mask frame through which a plurality of openings is defined and a plurality of cell masks disposed to respectively correspond to the cell openings. Each of the cell masks includes a mask main body substantially parallel to a plane defined by a first direction and a second direction crossing the first direction, where a plurality of holes is defined through the mask main body, a bonding portion disposed along an edge of the mask main body, and a tensile portion extending from the bonding portion and disposed spaced apart from the mask main body. The tensile portion includes first tensile portions spaced apart from each other in the first direction and disposed at opposite sides of the mask main body and second tensile portions spaced apart from each other in the second direction and disposed at opposite sides of the mask main body.

公开(公告)号：US12054820B2

公开(公告)日：2024-08-06

申请号：US17731799

申请日：2022-04-28

Applicant: Samsung Display Co., Ltd.

Inventor： Minho Moon ,  Youngmin Moon ,  Ji-Hee Son ,  Seungyong Song

IPC: C23C14/04 ,  B05C21/00 ,  H10K71/00 ,  H10K71/16

CPC classification number: C23C14/042 ,  B05C21/005 ,  H10K71/166

Abstract: A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.

公开(公告)号：US11825727B2

公开(公告)日：2023-11-21

申请号：US17396874

申请日：2021-08-09

Applicant: Samsung Display Co., Ltd.

Inventor： Seul Lee ,  Minho Moon ,  Youngmin Moon ,  Ji-Hee Son ,  Seungyong Song ,  Sungsoon Im

IPC: H10K71/00 ,  G03F7/00 ,  C23C16/04 ,  C23C14/04 ,  H10K59/12

CPC classification number: H10K71/00 ,  C23C14/042 ,  C23C16/042 ,  G03F7/0015 ,  H10K59/12

Abstract: A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.

公开(公告)号：US09999943B2

公开(公告)日：2018-06-19

申请号：US15091913

申请日：2016-04-06

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Sungsoon Im ,  Minho Moon ,  Soonchul Chang

IPC: H01L21/302 ,  H01L21/461 ,  C25F3/00 ,  B23P15/00 ,  C03C25/00 ,  C23F1/00 ,  C03C15/00 ,  C03C25/68 ,  B44C1/22 ,  B23K26/384 ,  B23K26/00 ,  B23K26/40 ,  C23C14/04 ,  H01L51/00 ,  B23K103/18

CPC classification number: B23K26/384 ,  B23K26/0093 ,  B23K26/40 ,  B23K2103/26 ,  C23C14/042 ,  G03F7/004 ,  H01L21/02063 ,  H01L21/76804 ,  H01L51/0011

Abstract: A method of manufacturing a mask includes forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different than the first surface, and expanding the first hole using an etchant to form a second hole.

公开(公告)号：US12116660B2

公开(公告)日：2024-10-15

申请号：US17383787

申请日：2021-07-23

Applicant: Samsung Display Co., Ltd.

Inventor： Ji-Hee Son ,  Minho Moon ,  Youngmin Moon ,  Seungyong Song ,  Seul Lee ,  Sungsoon Im

IPC: C23C14/04 ,  C23C16/34 ,  C23C16/40 ,  C23C16/56 ,  G03F7/00 ,  G03F7/16 ,  C23C14/24 ,  C23C14/34 ,  H10K59/12 ,  H10K71/16

CPC classification number: C23C14/042 ,  C23C16/345 ,  C23C16/401 ,  C23C16/56 ,  G03F7/0015 ,  G03F7/167 ,  C23C14/24 ,  C23C14/34 ,  H10K59/12 ,  H10K71/166

Abstract: A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.

公开(公告)号：US12058923B2

公开(公告)日：2024-08-06

申请号：US17336543

申请日：2021-06-02

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Minho Moon ,  Seungyong Song ,  Sungsoon Im

IPC: H10K71/16 ,  B23K26/38 ,  H10K71/00

CPC classification number: H10K71/166 ,  B23K26/38 ,  H10K71/00 ,  H10K71/164 ,  H10K71/861

Abstract: A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.

公开(公告)号：US11864453B2

公开(公告)日：2024-01-02

申请号：US17452279

申请日：2021-10-26

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Minho Moon ,  Ji-Hee Son ,  Seungyong Song ,  Sungsoon Im ,  Junho Jo

IPC: H01L51/56 ,  C23C14/04 ,  C23C14/24 ,  B23K26/244 ,  B23K26/364 ,  H10K71/00 ,  B23K26/0622

CPC classification number: H10K71/00 ,  B23K26/244 ,  B23K26/364 ,  C23C14/042 ,  C23C14/24 ,  B23K26/0622

Abstract: Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.

公开(公告)号：US20170369821A1

公开(公告)日：2017-12-28

申请号：US15632170

申请日：2017-06-23

Applicant: Samsung Display Co., Ltd.

Inventor： Sungsoon Im ,  Kyuhwan Hwang ,  Youngmin Moon ,  Minho Moon ,  Inho Kong ,  Changsub Kim ,  Hotae Kim ,  Jaehwan Jin ,  Donguk Hwang

IPC: C11D11/00 ,  C11D1/14 ,  C11D3/04 ,  C11D3/20 ,  B08B3/08

CPC classification number: C11D11/0047 ,  B08B3/08 ,  C11D1/143 ,  C11D3/042 ,  C11D3/046 ,  C11D3/2075 ,  C11D3/2086 ,  C11D11/0029

Abstract: The present disclosure relates to a cleaning composition for removing an oxide including one selected from an organic acid, an inorganic acid, and any combination thereof; one selected from an organic salt, an inorganic salt, and any combination thereof; an oxidizing agent; a surfactant; and water, and a method of cleaning using the cleaning composition.

公开(公告)号：US11891688B2

公开(公告)日：2024-02-06

申请号：US17748596

申请日：2022-05-19

Applicant: Samsung Display Co., Ltd.

Inventor： Youngmin Moon ,  Jeongkuk Kim ,  Minho Moon ,  Ji-Hee Son ,  Seungyong Song ,  Areum Lee

IPC: C23C16/04

CPC classification number: C23C16/042 ,  C23C16/045

Abstract: A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.

公开(公告)号：US11678559B2

公开(公告)日：2023-06-13

申请号：US17030372

申请日：2020-09-24

Applicant: Samsung Display Co., Ltd.

Inventor： Minho Moon ,  Jinoh Kwag ,  Inbae Kim ,  Seungyong Song ,  Duckjung Lee ,  Hyeyong Chu

IPC: H10K71/00 ,  H10K71/16 ,  C23C14/04 ,  H01L51/56 ,  H01L51/00

CPC classification number: H01L51/56 ,  H01L51/0011 ,  C23C14/042

Abstract: An apparatus for manufacturing a display device includes: a mask assembly, wherein the mask assembly includes: a mask frame including an open area; a first mask disposed on the mask frame, the first mask including at least one opening; a second mask disposed on the first mask, the second mask including a mesh portion having a mesh shape and a blocking member to shield a portion of the mesh portion; and a first support supporting a display substrate on the second mask and separating the display substrate from the second mask, wherein the blocking member overlaps the opening.